Electrochemical development of hydrogen silsesquioxane by applying an electrical potential.

نویسندگان

  • Sebastian Strobel
  • Katherine J Harry
  • Huigao Duan
  • Joel K W Yang
  • Vitor R Manfrinato
  • Karl K Berggren
چکیده

We present a new method for developing hydrogen silsesquioxane (HSQ) by using electrical potentials and deionized water. Nested-L test structures with a pitch as small as 9 nm were developed using this electrochemical technique in saline solution without adding hydroxyl ions. Furthermore, we showed that high-resolution structures can be electrochemically developed in deionized water alone. Electrochemical development is controlled by the applied voltage and may overcome several of the limitations discussed for alkaline developers, such as poor hydroxyl anion diffusion and charge repulsion effects in small trenches.

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عنوان ژورنال:
  • Nanotechnology

دوره 22 37  شماره 

صفحات  -

تاریخ انتشار 2011